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M t normuradov, B. E umirzaqov, A. Q tashatov nanotexnologiya asoslari Pdf ko'rish
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Bog'liq NANOTEXNOLOGIYA ASOSLARI (UMUMIY) 22.06.2020 (1)
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6.5.Rasterli elektron mikroskopi.......................................................................
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6.6.Nanoob’yektlarni o‘rganishning zamonaviy zondli usullari....................
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6.6.1.Skanerlovchi tunnel mikroskop, atom – kuchlanishli mikroskop.
Ularning qurilmalari, ishlash prinsiplari...........................................................
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6.6.2.Kontaktli atom – kuchlanishli mikroskopiya...........................................
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VII-BOB.
MIKRO–
VA
NANOELEKTRONIKADA
QO‘LLANILADIGAN MATERIALLAR TO‘G‘RISIDA UMUMIY
MA’LUMOTLAR............................................................................................
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7.1.Mikrоelеktrоnikа mаtеriаllаrining tаsnifi....................................................
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7.2.Qаttiq fаzаdа kristаllаrni o`stirish...............................................................
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7.3.Gаz fаzаsidаn kristаllаr o`stirish.................................................................
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7.4.Si va Ge asosida hosil qilingan nanotizimlar.............................................
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7.5.Kvant nuqta, kvant sim, kvant o‘ralarni hosil qilish. Ularning kristal va
elektron tuzilishi...............................................................................................
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7.6. Epitaksiya va ion – implantatsiya usullari bilan nanosilitsidlar hosil
qilish..................................................................................................................
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7.7. “Yarim o’tkazgich-dielektrik-yarim o’tkazgich” va “Metal-dielektrik-
yarim o’tkazgich” nanotizimlar hosil qilishning istiqbollari...........................
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